Inventor
NGUYEN PHUONG VAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN PHUONG VAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGUYEN PHUONG VAN
4 patentsUSD678745SMar 26, 2013
Spinning insert polishing pad
NGUYEN PHUONG VAN40 citations92
USD684551SJun 18, 2013
Wafer polishing pad holder
NGUYEN PHUONG VAN27 citations90
US8182315B2May 22, 2012
Chemical mechanical polishing pad and dresser
NGUYEN PHUONG VAN27 citations90
US8414361B2Apr 9, 2013
Silicon carbide, sapphire, germanium, silicon and pattern wafer polishing templates holder
NGUYEN PHUONG VAN4 citations53
(unassigned)
4 patentsUS6733367B1May 11, 2004
Method and apparatus for polishing silicon wafers
33 citations90
US6666948B2Dec 23, 2003
Silicon wafer polisher
25 citations90
US6645049B2Nov 11, 2003
Polishing holder for silicon wafers and method of use thereof
12 citations71
US6612905B2Sep 2, 2003
Silicon wafer polishing holder and method of use thereof
11 citations71