Inventor

HYLAND SANDRA L

US3 patents

⚠️ This page may combine multiple inventors who share the name “HYLAND SANDRA L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7883835B2Feb 8, 2011

Method for double patterning a thin film

TOKYO ELECTRON LTD0 citations34

US7811747B2Oct 12, 2010

Method of patterning an anti-reflective coating by partial developing

TOKYO ELECTRON LTD0 citations34

BAE SYSTEMS INFORMATION & ELECTRONIC SYSTEMS INTEGRATION INC

1 patent

US9255345B2Feb 9, 2016

Method for growing germanium/silicon—germanium superlattice

BAE SYSTEMS INFORMATION & ELECTRONIC SYSTEMS INTEGRATION INC0 citations31