Inventor
TORTI RICHARD P
US4 patents
Patents
4 patentsUS6635883B2Oct 21, 2003
Gas cluster ion beam low mass ion filter
EPION CORP53 citations94
US6486478B1Nov 26, 2002
Gas cluster ion beam smoother apparatus
EPION CORP126 citations93
US6831272B2Dec 14, 2004
Gas cluster ion beam size diagnostics and workpiece processing
EPION CORP24 citations91
US6737643B2May 18, 2004
Detector and method for cluster ion beam diagnostics
EPION CORP29 citations91