Inventor

DE GROOT PETER J

US60 patents

⚠️ This page may combine multiple inventors who share the name “DE GROOT PETER J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DE GROOT PETER J

ZYGO CORP

Scanning interferometry for thin film thickness and surface measurements

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

Interferometry method and apparatus for producing lateral metrology images

Interferometer having a coupled cavity geometry for use with an extended source

Measurement of complex surface shapes using a spherical wavefront

Interferometric apparatus and method for measuring motion along multiple axes

Interferometers utilizing polarization preserving optical systems

Profiling complex surface structures using scanning interferometry

Interferometric optical systems having simultaneously scanned optical path length and focus

Methods and systems for interferometric analysis of surfaces and related applications

Triangulation methods and systems for profiling surfaces through a thin film coating

Surface profiling using an interference pattern matching template

Profiling complex surface structures using scanning interferometry

Profiling complex surface structures using height scanning interferometry

Phase gap analysis for scanning interferometry

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

Measurement of complex surface shapes using a spherical wavefront

Optical surface profiling systems

Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components

Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer

Interferometer with tilted waveplates for reducing ghost reflections

Extended-range two-color interferometer

Low coherence interferometry with scan error correction

Scanning interferometry for thin film thickness and surface measurements

Profiling complex surface structures using scanning interferometry

Low coherence grazing incidence interferometry for profiling and tilt sensing

Scanning interferometry

Metrology of multi-layer stacks

Double pass interferometric encoder system

Interferometric heterodyne optical encoder system

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

Interferometry systems and methods using spatial carrier fringes

Apparatus and method for mechanical phase shifting interferometry

Interferometer for measuring the thickness profile of thin transparent substrates

Method and system for determining information about a transparent optical element comprising a lens portion and a plane parallel portion

Measuring topography of aspheric and other non-flat surfaces

Calibration of scanning interferometers

Equal-path interferometer

Methods and systems for interferometric analysis of surfaces and related applications

Methods and systems for interferometric analysis of surfaces and related applications

Interferometry employing refractive index dispersion broadening of interference signals

Multi-axis interferometer

BOEING CO

Chirped synthetic wavelength laser radar

PERKIN ELMER CORP

Position and velocity imaging system using 2-D laser diode array

DECK LESLIE L

Interferometric encoder systems

LIESENER JAN

Interferometric systems and methods featuring spectral analysis of unevenly sampled data

HUGHES DANBURY OPTICAL SYSTEM

Laser diode interferometer

DE GROOT PETER J

Interferometric heterodyne optical encoder system

COLONNA DE LEGA XAVIER M

Interferometric methods for metrology of surfaces, films and underresolved structures