Inventor
KAHN RANDOLPH W
US6 patents
Patents
6 patentsUS5963881AOct 5, 1999
Method and system for enhancing the identification of causes of variations in the performance of manufactured articles
TEXAS INSTRUMENTS INC130 citations94
US6684125B2Jan 27, 2004
In-situ randomization and recording of wafer processing order at process tools
TEXAS INSTRUMENTS INC16 citations92
US5864130AJan 26, 1999
Apparatus for semiconductor wafer identification
TEXAS INSTRUMENTS INC23 citations88
US5567927AOct 22, 1996
Apparatus for semiconductor wafer identification
TEXAS INSTRUMENTS INC53 citations88
US6975920B2Dec 13, 2005
In-situ randomization and recording of wafer processing order at process tools
TEXAS INSTRUMENTS INC11 citations73
US6862495B2Mar 1, 2005
In-situ randomization and recording of wafer processing order at process tools
TEXAS INSTRUMENTS INC10 citations73