Inventor

GULDI RICHARD L

US52 patents

⚠️ This page may combine multiple inventors who share the name “GULDI RICHARD L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GULDI RICHARD L

TEXAS INSTRUMENTS INC

Method and apparatus for verifying the presence of a material applied to a substrate

Sensitive test structure for assessing pattern anomalies

Semiconductor wafer edge marking

Method for improving gate oxide integrity using low temperature oxidation during source/drain anneal

Semiconductor wafer edge marking

Method for cleaning a process chamber used for manufacturing substrates during nonproduction intervals

Method for rotational wafer cleaning in solution

Apparatus for wafer cleaning with rotation

Programmable physical action during integrated circuit wafer cleanup

Method for reducing dopant diffusion

In-situ randomization and recording of wafer processing order at process tools

Semiconductor cleaning solution and method

Enhanced cleansing process for wafer handling implements

Method for wafer carrier cleaning

X-ray defect detection in integrated circuit metallization

Method and apparatus for in-situ reticle cleaning at photolithography tool

Apparatus for in-situ reticle cleaning at photolithography tool

System for processing wafers and cleaning wafer-handling implements

Method for processing wafers and cleaning wafer-handling implements

Enhanced high pressure cleansing system for wafer handling implements

Robot crash sensor system

Two step oxide removal for memory cells

Structures for testing and locating defects in integrated circuits

Method for improving wafer sleuth capability by adding wafer rotation tracking

Semiconductive device fabricated using subliming materials to form interlevel dielectrics

System and method for cleaning nozzle delivering spin-on-glass to substrate

Method and apparatus for cassette integrity testing using a wafer sorter

System and method for electroplating fine geometries

Method of fabrication of a semiconductor device having a tapered implanted region

Tool for cleaning LPCVD furnace tube

Method for reducing lateral dopant diffusion

In-situ randomization and recording of wafer processing order at process tools

In-situ randomization and recording of wafer processing order at process tools

Method of simultaneous fabrication of isolation and gate regions in a semiconductor device

Automated substrate pattern recognition system

X-ray confocal defect detection systems and methods

Method for efficient filtration of chemical baths

Apparatus and method for cleaning a vertical furnace pedestal and cap

Method for intelligent sampling of particulates in exhaust lines

Methods for detecting structure dependent process defects

Error reduction in semiconductor processes

Error reduction in semiconductor processes

System and method for exposure of partial edge die

Method for producing wafer notches with rounded corners and a tool therefor

Method for producing wafers with rounded corners in the notches used for alignment in the fabrication of semiconductor devices

Alignment mark for e-beam inspection of a semiconductor wafer

Structural modification to enhance DRAM gate oxide quality

Adjustable lithography blocking device and method

Pretreatment for an electroplating process and an electroplating process in including the pretreatment

DETWEILER SHANGTING

By-die-exposure for patterning of holes in edge die