Inventor

QUINN STEPHEN M

US2 patents

⚠️ This page may combine multiple inventors who share the name “QUINN STEPHEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

1 patent

US6208095B1Mar 27, 2001

Compact helical resonator coil for ion implanter linear accelerator

AXCELIS TECH INC37 citations90

AXCHLISRTECHNOLOGIES INC

1 patent

US6291828B1Sep 18, 2001

Glass-like insulator for electrically isolating electrodes from ion implanter housing

AXCHLISRTECHNOLOGIES INC12 citations67