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Inventor
CASEMENT L SUZANNE
US
2 patents
Patents
2 patents
US6420705B2
Jul 16, 2002
Method and apparatus for inspection of a substrate by use of a ring illuminator
TRW INC
16 citations
90
US6236044B1
May 22, 2001
Method and apparatus for inspection of a substrate by use of a ring illuminator
TRW INC
21 citations
90