Inventor

PETHE ABHIJIT

US2 patents

Patents

2 patents

US8945414B1Feb 3, 2015

Oxide removal by remote plasma treatment with fluorine and oxygen radicals

INTERMOLECULAR INC93 citations94

US9312137B2Apr 12, 2016

Reduction of native oxides by annealing in reducing gas or plasma

INTERMOLECULAR INC0 citations48