Inventor
MANGIPUDI SHRIRAM
US5 patents
Patents
5 patentsUS11600761B2Mar 7, 2023
High critical temperature metal nitride layer with oxide or oxynitride seed layer
APPLIED MATERIALS INC4 citations73
US11678589B2Jun 13, 2023
Method of making high critical temperature metal nitride layer
APPLIED MATERIALS INC1 citations72
US12185643B2Dec 31, 2024
High critical temperature metal nitride layer with oxide or oxynitride seed layer
APPLIED MATERIALS INC0 citations61
US12096701B2Sep 17, 2024
Method of making high critical temperature metal nitride layer
APPLIED MATERIALS INC0 citations61
US12052935B2Jul 30, 2024
Method of making high critical temperature metal nitride layer
APPLIED MATERIALS INC0 citations61