Inventor
KOYAMA YOSHIHIRO
JP23 patents
⚠️ This page may combine multiple inventors who share the name “KOYAMA YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIKO INSTR INC
6 patentsUS6395347B1May 28, 2002
Micromachining method for workpiece observation
SEIKO INSTR INC68 citations96
US6365905B1Apr 2, 2002
Focused ion beam processing apparatus
SEIKO INSTR INC24 citations92
US6118122ASep 12, 2000
Ion beam working apparatus
SEIKO INSTR INC21 citations92
US6576913B2Jun 10, 2003
Focused ion beam apparatus having a gas injector in which one of a plurality of nozzles can be selectively driven for elevation
SEIKO INSTR INC8 citations73
US6225627B1May 1, 2001
Focused ion beam system
SEIKO INSTR INC10 citations73
US6348689B1Feb 19, 2002
Focused ion beam apparatus
SEIKO INSTR INC4 citations62
DAINIPPON SCREEN MFG
4 patentsUS4746857AMay 24, 1988
Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer
DAINIPPON SCREEN MFG108 citations95
US7396199B2Jul 8, 2008
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG18 citations83
US6868302B2Mar 15, 2005
Thermal processing apparatus
DAINIPPON SCREEN MFG11 citations73
US7279079B2Oct 9, 2007
Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method
DAINIPPON SCREEN MFG2 citations61