Inventor

RAMIREZ ERICKA M

US2 patents

Patents

2 patents

US6528767B2Mar 4, 2003

Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications

APPLIED MATERIALS INC561 citations95

US6924462B2Aug 2, 2005

Pedestal for flat panel display applications

APPLIED MATERIALS INC5 citations70