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Inventor
HARADA KANAKO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “HARADA KANAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
1 patent
US6826735B2
Nov 30, 2004
Inspection data analysis program, defect inspection apparatus, defect inspection system and method for semiconductor device
HITACHI LTD
34 citations
90
HITACHI HIGH TECH CORP
1 patent
US6928375B2
Aug 9, 2005
Inspection condition setting program, inspection device and inspection system
HITACHI HIGH TECH CORP
8 citations
70