Inventor
PARK HEUNGSOO
US3 patents
Patents
3 patentsUS6838300B2Jan 4, 2005
Chemical treatment of low-k dielectric films
TEXAS INSTRUMENTS INC34 citations91
US6713402B2Mar 30, 2004
Methods for polymer removal following etch-stop layer etch
TEXAS INSTRUMENTS INC35 citations88
US6645781B1Nov 11, 2003
Method to determine a complete etch in integrated devices
TEXAS INSTRUMENTS INC12 citations71