Inventor
KROON MARK
NL28 patents
⚠️ This page may combine multiple inventors who share the name “KROON MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
21 patentsUS7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7145641B2Dec 5, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV45 citations95
US7907255B2Mar 15, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US7315346B2Jan 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV27 citations90
US10025204B2Jul 17, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations83
US9316919B2Apr 19, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations83
US7075620B2Jul 11, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations74
US8035798B2Oct 11, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations73
US6747282B2Jun 8, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV12 citations73
US6721389B2Apr 13, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations70
US7459690B2Dec 2, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations63
US7274432B2Sep 25, 2007
Radiation system, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV2 citations63
US11003096B2May 11, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US9568841B2Feb 14, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations62
US7230674B2Jun 12, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7142287B2Nov 28, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV2 citations62
US6888151B2May 3, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations62
US10678139B2Jun 9, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10514618B2Dec 24, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10180629B2Jan 15, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7599811B2Oct 6, 2009
Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus
ASML NETHERLANDS BV0 citations42
LOF JOERI
5 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US9541843B2Jan 10, 2017
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
LOF JOERI0 citations52
US9081299B2Jul 14, 2015
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
LOF JOERI0 citations52
US9152058B2Oct 6, 2015
Lithographic apparatus and device manufacturing method involving a member and a fluid opening
LOF JOERI0 citations51