Inventor
MYCKE JACQUES ROGER ALICE
NL2 patents
Patents
2 patentsUS8114568B2Feb 14, 2012
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS12 citations77
US8394572B2Mar 12, 2013
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS0 citations45