P

Inventor

MORIYA MASATO

JP72 patents
⚠️ This page may combine multiple inventors who share the name “MORIYA MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GIGAPHOTON INC

15 patents
US7923705B2Apr 12, 2011

Extreme ultra violet light source apparatus

GIGAPHOTON INC25 citations92
US8957356B2Feb 17, 2015

System and method for generating extreme ultraviolet light

GIGAPHOTON INC8 citations84
US7196796B2Mar 27, 2007

Wavelength detecting apparatus, laser apparatus, and wavelength detecting method

GIGAPHOTON INC10 citations82
US10890484B2Jan 12, 2021

Wavelength measuring device

GIGAPHOTON INC2 citations73
US9667019B2May 30, 2017

Laser apparatus and extreme ultraviolet light generation system

GIGAPHOTON INC4 citations73
US9277635B2Mar 1, 2016

Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light

GIGAPHOTON INC3 citations73
US8698114B2Apr 15, 2014

Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device

GIGAPHOTON INC4 citations73
US9882343B2Jan 30, 2018

Narrow band laser apparatus

GIGAPHOTON INC5 citations71
US9835495B2Dec 5, 2017

Light beam measurement device, laser apparatus, and light beam separator

GIGAPHOTON INC2 citations70
US11079686B2Aug 3, 2021

Excimer laser apparatus and electronic-device manufacturing method

GIGAPHOTON INC2 citations69
US9841684B2Dec 12, 2017

Light source apparatus and data processing method

GIGAPHOTON INC2 citations69
US9439275B2Sep 6, 2016

System and method for generating extreme ultraviolet light

GIGAPHOTON INC1 citations63
US9363878B2Jun 7, 2016

Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters

GIGAPHOTON INC2 citations63
US9184551B2Nov 10, 2015

Laser apparatus and extreme ultraviolet light generation system

GIGAPHOTON INC2 citations62
US9099836B2Aug 4, 2015

Laser beam amplifier and laser apparatus using the same

GIGAPHOTON INC2 citations62

MORIYA MASATO

12 patents
US8242472B2Aug 14, 2012

Extreme ultraviolet light source device and control method for extreme ultraviolet light source device

MORIYA MASATO37 citations93
US8395133B2Mar 12, 2013

Apparatus and method of adjusting a laser light source for an EUV source device

MORIYA MASATO21 citations92
US8536551B2Sep 17, 2013

Extreme ultra violet light source apparatus

MORIYA MASATO10 citations84
US8502178B2Aug 6, 2013

Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon

MORIYA MASATO12 citations84
US8399870B2Mar 19, 2013

Extreme ultraviolet light source device and control method for extreme ultraviolet light source device

MORIYA MASATO8 citations84
US8256441B2Sep 4, 2012

Method for cleaning optical element of EUV light source device and optical element cleaning device

MORIYA MASATO15 citations84
US8198613B2Jun 12, 2012

Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device

MORIYA MASATO12 citations84
US8173984B2May 8, 2012

Extreme ultraviolet light source apparatus

MORIYA MASATO8 citations84
US8847181B2Sep 30, 2014

System and method for generating extreme ultraviolet light

MORIYA MASATO6 citations73
US9325150B2Apr 26, 2016

Alignment system and extreme ultraviolet light generation system

MORIYA MASATO2 citations63
US8592787B2Nov 26, 2013

Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device

MORIYA MASATO3 citations62
US8481983B2Jul 9, 2013

Extreme ultra violet light source apparatus

MORIYA MASATO2 citations62

KOMATSU MFG CO LTD

9 patents

SEIKI HANBAI CO LTD

6 patents

KOMATSU DENSHI KINZOKU KK

2 patents

UENO YOSHIFUMI

1 patent

ASAYAMA TAKESHI

1 patent

ABE TAMOTSU

1 patent

(unassigned)

1 patent

WATANABE YUKIO

1 patent

NEC CORP

1 patent

Showing the top 50 of 72 patents by PatentIndex Score.