Inventor
PENA Vanessa
BE5 patents
Patents
5 patentsUS10177227B1Jan 8, 2019
Method for fabricating junctions and spacers for horizontal gate all around devices
APPLIED MATERIALS INC40 citations92
US9865735B2Jan 9, 2018
Horizontal gate all around and FinFET device isolation
APPLIED MATERIALS INC4 citations83
US11145761B2Oct 12, 2021
Horizontal gate all around and FinFET device isolation
APPLIED MATERIALS INC2 citations72
US10490666B2Nov 26, 2019
Horizontal gate all around and FinFET device isolation
APPLIED MATERIALS INC1 citations72
US12262559B2Mar 25, 2025
Monolithic complementary field-effect transistors having carbon-doped release layers
APPLIED MATERIALS INC0 citations46