Inventor
KIM SANG-KAP
KR4 patents
Patents
4 patentsUS6992270B2Jan 31, 2006
Wafer bake system and method for operating the same
SAMSUNG ELECTRONICS CO LTD16 citations83
US6613487B1Sep 2, 2003
Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same
SAMSUNG ELECTRONICS CO LTD10 citations71
US7268853B2Sep 11, 2007
Exposing systems providing post exposure baking and related methods
SAMSUNG ELECTRONICS CO LTD5 citations53
US6737206B2May 18, 2004
Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same
SAMSUNG ELECTRONICS CO LTD0 citations49