Inventor
TOMA DOREL IOAN
US7 patents
Patents
7 patentsUS7553769B2Jun 30, 2009
Method for treating a dielectric film
TOKYO ELECTRON LTD19 citations91
US7115993B2Oct 3, 2006
Structure comprising amorphous carbon film and method of forming thereof
TOKYO ELECTRON LTD37 citations91
US7345000B2Mar 18, 2008
Method and system for treating a dielectric film
TOKYO ELECTRON LTD23 citations89
US7199046B2Apr 3, 2007
Structure comprising tunable anti-reflective coating and method of forming thereof
TOKYO ELECTRON LTD15 citations83
US7270941B2Sep 18, 2007
Method of passivating of low dielectric materials in wafer processing
TOKYO ELECTRON LTD9 citations72
US7807213B2Oct 5, 2010
Method and system for characterizing porous materials
TOKYO ELECTRON LTD3 citations60
US7238382B2Jul 3, 2007
Method and system for characterizing porous materials
TOKYO ELECTRON LTD0 citations50