Inventor
SUGITANI MICHIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SUGITANI MICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO EATON NOVA
7 patentsUS6794661B2Sep 21, 2004
Ion implantation apparatus capable of increasing beam current
SUMITOMO EATON NOVA37 citations91
US6573517B1Jun 3, 2003
Ion implantation apparatus
SUMITOMO EATON NOVA46 citations91
US6984833B2Jan 10, 2006
Ion implanter and method for controlling the same
SUMITOMO EATON NOVA14 citations84
US7187143B2Mar 6, 2007
Mover device and semiconductor manufacturing apparatus and method
SUMITOMO EATON NOVA16 citations82
US6797968B2Sep 28, 2004
Ion beam processing method and apparatus therefor
SUMITOMO EATON NOVA15 citations82
US6815697B2Nov 9, 2004
Ion beam charge neutralizer and method therefor
SUMITOMO EATON NOVA8 citations73
US6635889B2Oct 21, 2003
Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof
SUMITOMO EATON NOVA7 citations73
SEN CORP AN SHI AND AXCELIS CO
3 patentsUS7315034B2Jan 1, 2008
Irradiation system with ion beam/charged particle beam
SEN CORP AN SHI AND AXCELIS CO7 citations73
US7304319B2Dec 4, 2007
Wafer charge compensation device and ion implantation system having the same
SEN CORP AN SHI AND AXCELIS CO7 citations73
US7597531B2Oct 6, 2009
Method of controlling mover device
SEN CORP AN SHI AND AXCELIS CO3 citations60