Inventor

HIDAKA YOSHITOMO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “HIDAKA YOSHITOMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO EATON NOVA

2 patents

US6573517B1Jun 3, 2003

Ion implantation apparatus

SUMITOMO EATON NOVA46 citations91

US7187143B2Mar 6, 2007

Mover device and semiconductor manufacturing apparatus and method

SUMITOMO EATON NOVA16 citations82

SEN CORP AN SHI AND AXCELIS CO

1 patent

US7597531B2Oct 6, 2009

Method of controlling mover device

SEN CORP AN SHI AND AXCELIS CO3 citations60