Inventor
TSUKIHARA MITSUKUNI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “TSUKIHARA MITSUKUNI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO EATON NOVA
7 patentsUS6794661B2Sep 21, 2004
Ion implantation apparatus capable of increasing beam current
SUMITOMO EATON NOVA37 citations91
US6573517B1Jun 3, 2003
Ion implantation apparatus
SUMITOMO EATON NOVA46 citations91
US6984833B2Jan 10, 2006
Ion implanter and method for controlling the same
SUMITOMO EATON NOVA14 citations84
US7187143B2Mar 6, 2007
Mover device and semiconductor manufacturing apparatus and method
SUMITOMO EATON NOVA16 citations82
US6797968B2Sep 28, 2004
Ion beam processing method and apparatus therefor
SUMITOMO EATON NOVA15 citations82
US7138641B2Nov 21, 2006
Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
SUMITOMO EATON NOVA8 citations73
US6635889B2Oct 21, 2003
Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof
SUMITOMO EATON NOVA7 citations73
SEN CORP AN SHI AND AXCELIS CO
6 patentsUS7276711B2Oct 2, 2007
Beam space-charge compensation device and ion implantation system having the same
SEN CORP AN SHI AND AXCELIS CO11 citations83
US7315034B2Jan 1, 2008
Irradiation system with ion beam/charged particle beam
SEN CORP AN SHI AND AXCELIS CO7 citations73
US7304319B2Dec 4, 2007
Wafer charge compensation device and ion implantation system having the same
SEN CORP AN SHI AND AXCELIS CO7 citations73
US7791049B2Sep 7, 2010
Ion implantation apparatus
SEN CORP AN SHI AND AXCELIS CO3 citations62
US7687782B2Mar 30, 2010
Electrostatic beam deflection scanner and beam deflection scanning method
SEN CORP AN SHI AND AXCELIS CO3 citations61
US7597531B2Oct 6, 2009
Method of controlling mover device
SEN CORP AN SHI AND AXCELIS CO3 citations60
SEN CORP AN SHI & AXCELIS CO
5 patentsUS7351987B2Apr 1, 2008
Irradiation system with ion beam
SEN CORP AN SHI & AXCELIS CO20 citations91
US7429743B2Sep 30, 2008
Irradiation system ion beam and method to enhance accuracy of irradiation
SEN CORP AN SHI & AXCELIS CO13 citations83
US7982192B2Jul 19, 2011
Beam processing apparatus
SEN CORP AN SHI & AXCELIS CO6 citations61
US7851772B2Dec 14, 2010
Ion implantation apparatus and ion implantation method
SEN CORP AN SHI & AXCELIS CO6 citations61
US7411709B2Aug 12, 2008
Beam processing system and beam processing method
SEN CORP AN SHI & AXCELIS CO0 citations35
SEN CORP
5 patentsUS7361892B2Apr 22, 2008
Method to increase low-energy beam current in irradiation system with ion beam
SEN CORP12 citations84
US7718980B2May 18, 2010
Beam processing system and beam processing method
SEN CORP5 citations62
US7755067B2Jul 13, 2010
Ion implantation apparatus and method of converging/shaping ion beam used therefor
SEN CORP6 citations61
US8759801B2Jun 24, 2014
Ion implantation apparatus and ion implantation method
SEN CORP1 citations51
US9208996B2Dec 8, 2015
Ion implantation apparatus and ion implantation method
SEN CORP0 citations41