Inventor

HIROKAWA SUGURU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “HIROKAWA SUGURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EATON CORP

2 patents

US5608223AMar 4, 1997

Ion implantation device

EATON CORP50 citations91

US5525807AJun 11, 1996

Ion implantation device

EATON CORP26 citations87

SUMITOMO EATON NOVA

1 patent

US7187143B2Mar 6, 2007

Mover device and semiconductor manufacturing apparatus and method

SUMITOMO EATON NOVA16 citations82

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD

1 patent

US10896843B2Jan 19, 2021

Wafer holding device and wafer chucking and dechucking method

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD2 citations70

SEN CORP AN SHI AND AXCELIS CO

1 patent

US7597531B2Oct 6, 2009

Method of controlling mover device

SEN CORP AN SHI AND AXCELIS CO3 citations60

SUMITOMO HEAVY IND ION TECH CO LTD

1 patent

US9666413B2May 30, 2017

Ion implantation apparatus and control method for ion implantation apparatus

SUMITOMO HEAVY IND ION TECH CO LTD0 citations37