Inventor

SHINOZUKA MASAMITSU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SHINOZUKA MASAMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO EATON NOVA

2 patents

US7187143B2Mar 6, 2007

Mover device and semiconductor manufacturing apparatus and method

SUMITOMO EATON NOVA16 citations82

US6547504B2Apr 15, 2003

Wafer carrying system and carrying method thereof

SUMITOMO EATON NOVA8 citations68

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD

1 patent

US10896843B2Jan 19, 2021

Wafer holding device and wafer chucking and dechucking method

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD2 citations70

SEN CORP AN SHI AND AXCELIS CO

1 patent

US7597531B2Oct 6, 2009

Method of controlling mover device

SEN CORP AN SHI AND AXCELIS CO3 citations60