Inventor
FLAGELLO DONIS GEORGE
US11 patents
⚠️ This page may combine multiple inventors who share the name “FLAGELLO DONIS GEORGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS6887625B2May 3, 2005
Assist features for use in lithographic projection
ASML NETHERLANDS BV25 citations89
US7256873B2Aug 14, 2007
Enhanced lithographic resolution through double exposure
ASML NETHERLANDS BV12 citations83
US7684013B2Mar 23, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations82
US7548302B2Jun 16, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations82
US7206059B2Apr 17, 2007
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV9 citations73
US7317506B2Jan 8, 2008
Variable illumination source
ASML NETHERLANDS BV2 citations60
US7538875B2May 26, 2009
Lithographic apparatus and methods for use thereof
ASML NETHERLANDS BV2 citations59
US7952803B2May 31, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations40