P

Inventor

GEH BERND PETER

US4 patents
⚠️ This page may combine multiple inventors who share the name “GEH BERND PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US7684013B2Mar 23, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV12 citations82
US10607873B2Mar 31, 2020

Substrate edge detection

ASML NETHERLANDS BV2 citations66
US7423727B2Sep 9, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations57

TOTZECK MICHAEL

1 patent
US8339574B2Dec 25, 2012

Lithographic apparatus and device manufacturing method

TOTZECK MICHAEL2 citations57