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Inventor
BENDER STEVEN A
US
3 patents
Patents
3 patents
US4918930A
Apr 24, 1990
Electronically controlled cryopump
HELIX TECH CORP
103 citations
95
US5450316A
Sep 12, 1995
Electronic process controller having password override
HELIX TECH CORP
60 citations
94
US5157928A
Oct 27, 1992
Electronically controlled cryopump
HELIX TECH CORP
61 citations
94