Inventor

HOLLYWOOD WILLIAM K

US3 patents

Patents

3 patents

US5908530AJun 1, 1999

Apparatus for chemical mechanical polishing

OBSIDIAN INC106 citations97

US5759918AJun 2, 1998

Method for chemical mechanical polishing

OBSIDIAN INC198 citations97

US5938884AAug 17, 1999

Apparatus for chemical mechanical polishing

OBSIDIAN INC80 citations94