Inventor

LU YUN-CHENG

TW2 patents

Patents

2 patents

US7196423B2Mar 27, 2007

Interconnect structure with dielectric barrier and fabrication method thereof

TAIWAN SEMICONDUCTOR MFG17 citations82

US6787484B2Sep 7, 2004

Method of reducing visible light induced arcing in a semiconductor wafer manufacturing process

TAIWAN SEMICONDUCTOR MFG6 citations58