Inventor
MATEJA DANIEL
US3 patents
Patents
3 patentsUS8916061B2Dec 23, 2014
CMP compositions selective for oxide and nitride with high removal rate and low defectivity
CABOT MICROELECTRONICS CORP4 citations66
US9303187B2Apr 5, 2016
Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials
CABOT MICROELECTRONICS CORP1 citations45
US9850402B2Dec 26, 2017
CMP compositions and methods for selective removal of silicon nitride
CABOT MICROELECTRONICS CORP1 citations42