Inventor
PARK DONG-WOON
KR23 patents
⚠️ This page may combine multiple inventors who share the name “PARK DONG-WOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS7460210B2Dec 2, 2008
Auto focus system, auto focus method, and exposure apparatus using the same
SAMSUNG ELECTRONICS CO LTD11 citations83
US7954073B2May 31, 2011
Methods of arranging mask patterns responsive to assist feature contribution to image intensity and associated apparatus
SAMSUNG ELECTRONICS CO LTD5 citations62
US7937676B2May 3, 2011
Method of arranging mask patterns and apparatus using the method
SAMSUNG ELECTRONICS CO LTD2 citations62
US7877723B2Jan 25, 2011
Method of arranging mask patterns and apparatus using the method
SAMSUNG ELECTRONICS CO LTD6 citations62
US7433048B2Oct 7, 2008
Interferometer systems for measuring displacement and exposure systems using the same
SAMSUNG ELECTRONICS CO LTD5 citations62
US10643888B2May 5, 2020
Overlay marks, methods of forming the same, and methods of fabricating semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD1 citations60
US10553438B2Feb 4, 2020
Semiconductor device and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD1 citations57
SEMES CO LTD
5 patentsUS12476119B2Nov 18, 2025
Substrate processing apparatus and substrate processing method
SEMES CO LTD0 citations62
US12518982B2Jan 6, 2026
Apparatus for treating substrate connected to common duct
SEMES CO LTD0 citations51
US11829070B2Nov 28, 2023
Apparatus for treating a substrate
SEMES CO LTD0 citations51
US12331399B2Jun 17, 2025
Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid
SEMES CO LTD0 citations47
US12428730B2Sep 30, 2025
Apparatus for treating substrate
SEMES CO LTD0 citations46