Inventor

VOGELSANG PATRICK D

NL2 patents

Patents

2 patents

US6894261B2May 17, 2005

Position measuring system for use in lithographic apparatus

ASML NETHERLANDS BV12 citations79

US6875992B2Apr 5, 2005

Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method

ASML NETHERLANDS BV15 citations79