Inventor
SRINIVASAN EASWAR
US34 patents
⚠️ This page may combine multiple inventors who share the name “SRINIVASAN EASWAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
16 patentsUS10121689B2Nov 6, 2018
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
LAM RES CORP43 citations98
US9960068B1May 1, 2018
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
LAM RES CORP26 citations94
US9892956B1Feb 13, 2018
Wafer positioning pedestal for semiconductor processing
LAM RES CORP28 citations94
US11183400B2Nov 23, 2021
Progressive heating of components of substrate processing systems using TCR element-based heaters
LAM RES CORP5 citations84
US11056380B2Jul 6, 2021
Wafer positioning pedestal for semiconductor processing
LAM RES CORP4 citations84
US10870922B2Dec 22, 2020
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
LAM RES CORP6 citations84
US10699937B2Jun 30, 2020
Wafer positioning pedestal for semiconductor processing
LAM RES CORP8 citations84
US10354909B2Jul 16, 2019
Wafer positioning pedestal for semiconductor processing
LAM RES CORP5 citations84
US10020220B2Jul 10, 2018
Wafer positioning pedestal for semiconductor processing
LAM RES CORP9 citations84
US11387136B2Jul 12, 2022
Pad raising mechanism in wafer positioning pedestal for semiconductor processing
LAM RES CORP3 citations73
US10573549B2Feb 25, 2020
Pad raising mechanism in wafer positioning pedestal for semiconductor processing
LAM RES CORP3 citations73
US10570515B2Feb 25, 2020
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing
LAM RES CORP3 citations73
US10872747B2Dec 22, 2020
Controlling showerhead heating via resistive thermal measurements
LAM RES CORP4 citations68
US12062554B2Aug 13, 2024
Progressive heating of components of substrate processing systems using TCR element-based heaters
LAM RES CORP0 citations62
US11955366B2Apr 9, 2024
Pad raising mechanism in wafer positioning pedestal for semiconductor processing
LAM RES CORP0 citations62
US12209310B2Jan 28, 2025
Concentration control using a bubbler
LAM RES CORP0 citations43
NOVELLUS SYSTEMS INC
13 patentsUS7906174B1Mar 15, 2011
PECVD methods for producing ultra low-k dielectric films using UV treatment
NOVELLUS SYSTEMS INC507 citations98
US7265061B1Sep 4, 2007
Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties
NOVELLUS SYSTEMS INC632 citations98
US7253125B1Aug 7, 2007
Method to improve mechanical strength of low-k dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC82 citations97
US7611757B1Nov 3, 2009
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC39 citations95
US9070555B2Jun 30, 2015
Method for depositing a chlorine-free conformal sin film
NOVELLUS SYSTEMS INC31 citations94
US9230800B2Jan 5, 2016
Plasma activated conformal film deposition
NOVELLUS SYSTEMS INC41 citations93
US9670579B2Jun 6, 2017
Method for depositing a chlorine-free conformal SiN film
NOVELLUS SYSTEMS INC18 citations92
US8043667B1Oct 25, 2011
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC18 citations92
US7622400B1Nov 24, 2009
Method for improving mechanical properties of low dielectric constant materials
NOVELLUS SYSTEMS INC42 citations92
US9476120B2Oct 25, 2016
Temperature controlled showerhead
NOVELLUS SYSTEMS INC17 citations91
US7695765B1Apr 13, 2010
Methods for producing low-stress carbon-doped oxide films with improved integration properties
NOVELLUS SYSTEMS INC22 citations86
US10584415B2Mar 10, 2020
Temperature controlled showerhead
NOVELLUS SYSTEMS INC5 citations83
US10221484B2Mar 5, 2019
Temperature controlled showerhead
NOVELLUS SYSTEMS INC9 citations82