Inventor

HAYASHIDA AKIRA

JP51 patents

⚠️ This page may combine multiple inventors who share the name “HAYASHIDA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAYASHIDA AKIRA

SHINETSU CHEMICAL CO

Process for producing silicon carbide whiskers

Preparation of polysilanes

Preparation of hollow ceramic fibers

Process for manufacturing organic silazane polymers and ceramics therefrom

Method for the preparation of silicon carbide whiskers

Precursor composition of silicon carbide

Method for the preparation of an inorganic fiber containing silicon, carbon, boron and nitrogen

Ultrafine powder of silicon carbide, a method for the preparation thereof and a sintered body therefrom

Polycarbodiimide resin-containing adhesive and flexible printed circuit board

Organoborosilicon polymer and a method for the preparation thereof

Process for manufacturing organic silazane polymers and ceramics therefrom

Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers

Process for the preparation of diorganohalogenosilanes

Polycarbodiimide resin-containing adhesive and flexible printed circuit board

Polycarbodiimide derivatives and method for preparing the same

Process for the preparation of a high-molecular-weight polycarbodiimide solution

Method for the preparation of a sintered body of silicon carbide

Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers

Method for the preparation of a sintered body of silicon carbide

Method for manufacturing silicon carbide whisker

Polysilane compositions

Polysilane compositions

Method for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymer

Preparation of polysilanes

Method for preparing organic silazane polymers and method for preparing ceramics from the polymers

Method for preparing organic silazane polymers and method for preparing ceramics from the polymers

Preparation of polyorganosilanes

Preparation of polysilanes

Method for preparing hexamethyl cyclotrisilazane

Methods for preparing polytitanocarbosilazane polymers and ceramics therefrom

Tetrahydropyran-5-one compounds

Method for preparing crosslinked polycarbodiimides

Polycarbodiimide derivative and process for producing the same

Process for the preparation of a polycarbodiimide solution

Process for manufacturing organic silazane polymers and ceramics therefrom

Method for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymer

Method and apparatus for preparing organic silazane polymer and method for preparing inorganic fibers

Infusibilization of organic silazane polymers

Production of methylphenyltrisiloxane

UENO MASAAKI

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method

Substrate processing method and film forming method

HITACHI INT ELECTRIC INC

Substrate processing method and semiconductor manufacturing apparatus

Substrate processing apparatus having gas side flow via gas inlet

Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure

HAYASHIDA AKIRA

Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member

Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices

Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator

FUJITSU LTD

Information processing device and information processing method

YAMAZAKI KEISHIN

Heat treatment apparatus and method of manufacturing semiconductor device