Inventor

KITAMURA KIMIO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KITAMURA KIMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAYASHIDA AKIRA

3 patents

US8158911B2Apr 17, 2012

Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member

HAYASHIDA AKIRA3 citations59

US8116618B2Feb 14, 2012

Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices

HAYASHIDA AKIRA2 citations59

US9184069B2Nov 10, 2015

Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator

HAYASHIDA AKIRA1 citations48

HITACHI INT ELECTRIC INC

1 patent

US7863204B2Jan 4, 2011

Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure

HITACHI INT ELECTRIC INC3 citations61

ASAHI GLASS CO LTD

1 patent

US6492628B2Dec 10, 2002

Heater supporting structure and heating furnace for bending a glass sheet

ASAHI GLASS CO LTD1 citations50