Inventor
LEE HAK-SUN
KR16 patents
⚠️ This page may combine multiple inventors who share the name “LEE HAK-SUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
13 patentsUS7576010B2Aug 18, 2009
Method of forming pattern using fine pitch hard mask
SAMSUNG ELECTRONICS CO LTD19 citations92
US7550391B2Jun 23, 2009
Method for forming fine patterns of a semiconductor device using double patterning
SAMSUNG ELECTRONICS CO LTD30 citations92
US7601647B2Oct 13, 2009
Method of forming fine patterns of semiconductor device using double patterning
SAMSUNG ELECTRONICS CO LTD17 citations84
US9190404B2Nov 17, 2015
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD14 citations83
US9929099B2Mar 27, 2018
Planarized interlayer dielectric with air gap isolation
SAMSUNG ELECTRONICS CO LTD7 citations82
US9312181B2Apr 12, 2016
Semiconductor device, electronic device including the same and manufacturing methods thereof
SAMSUNG ELECTRONICS CO LTD3 citations71
US7998874B2Aug 16, 2011
Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD5 citations63
US8003469B2Aug 23, 2011
Method of manufacturing non-volatile semiconductor devices
SAMSUNG ELECTRONICS CO LTD2 citations62
US7935635B2May 3, 2011
Method of forming fine patterns of semiconductor devices using double patterning
SAMSUNG ELECTRONICS CO LTD2 citations62
US11876017B2Jan 16, 2024
Integrated circuit devices including enlarged via and fully aligned metal wire and methods of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US11232986B2Jan 25, 2022
Integrated circuit devices including enlarged via and fully aligned metal wire and methods of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US10600653B2Mar 24, 2020
Method for forming a fine pattern
SAMSUNG ELECTRONICS CO LTD1 citations59
US10186485B2Jan 22, 2019
Planarized interlayer dielectric with air gap isolation
SAMSUNG ELECTRONICS CO LTD0 citations51
LEE HAK-SUN
3 patentsUS8669622B2Mar 11, 2014
Non-volatile semiconductor devices and methods of manufacturing non-volatile semiconductor devices
LEE HAK-SUN3 citations60
US9312478B2Apr 12, 2016
Magnetic devices and methods of manufacturing the same
LEE HAK-SUN0 citations48
US8178408B2May 15, 2012
Methods of manufacturing charge trap-type non-volatile memory devices
LEE HAK-SUN0 citations39