Inventor

MOFFATT STEPHEN

US86 patents

⚠️ This page may combine multiple inventors who share the name “MOFFATT STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOFFATT STEPHEN

APPLIED MATERIALS INC

Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process

Ion implanter with post mass selection deceleration

Pulse train annealing method and apparatus

Substrate holder which is self-adjusting for substrate deformation

Substrate holder for retaining a substrate within a processing chamber

Method and apparatus for neutralizing space charge in an ion beam

Impurity-based waveguide detectors

Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation

System and methods for wafer charge reduction for ion implantation

Display screen or portion thereof with graphical user interface

Ion beam apparatus and a method for neutralizing space charge in an ion beam

Apparatus and method of improving beam shaping and beam homogenization

Pulse train annealing method and apparatus

Apparatus and methods for pulsed photo-excited deposition and etch

Crystallization processing for semiconductor applications

High speed phase scrambling of a coherent beam using plasma

Method of thermal processing structures formed on a substrate

Suitably short wavelength light for laser annealing of silicon in DSA type systems

Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit

Apparatus and method for speckle reduction in laser processing equipment

Enhanced process and hardware architecture to detect and correct realtime product substrates

Plasma-enhanced anneal chamber for wafer outgassing

Visual feedback for process control in RTP chambers

Visual feedback for process control in RTP chambers

Semiconductor processing tools with improved performance by use of hybrid learning models

Pulse train annealing method and apparatus

Supplemental energy for low temperature processes

Pulse train annealing method and apparatus

Crystallization processing for semiconductor applications

Apparatus and method for speckle reduction in laser processing equipment

Fiber laser substrate processing

Method and apparatus for decorrelation of spatially and temporally coherent light

Methods for fabricating lithography apparatus

Gas injector with baffle

Gas injector with baffle

Thermal processing apparatus

Multiple beam combiner for laser processing apparatus

MOFFATT STEPHEN

LED substrate processing

Managing thermal budget in annealing of substrates

Crystallization processing for semiconductor applications

Methods of solid phase recrystallization of thin film using pulse train annealing method

ADAMS BRUCE E

Apparatus and method of improving beam shaping and beam homogenization

Apparatus and method of improving beam shaping and beam homogenization

CAREY PAUL

Method of thermal processing structures formed on a substrate

Method of thermal processing structures formed on a substrate

APPLIED MATERIAL INC

Embedded waveguide detectors

STOWELL MICHAEL W

Apparatus and methods for microwave processing of semiconductor substrates

MERRY NIR

Use of infrared camera for real-time temperature monitoring and control

PAN HENG

Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction

SADE AMIKAM

Aperture control of thermal processing radiation