Inventor

AYAZI FARROKH

US74 patents

⚠️ This page may combine multiple inventors who share the name “AYAZI FARROKH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AYAZI FARROKH

GEORGIA TECH RES INST

Method for sealing and backside releasing of microelectromechanical systems

High-resolution in-plane tuning fork gyroscope and methods of fabrication

Resonating star gyroscope

Capacitive microaccelerometers and fabrication methods

Piezoelectric on semiconductor-on-insulator microelectromechanical resonators

Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators

Capacitive bulk acoustic wave disk gyroscopes

Capacitive resonators and methods of fabrication

Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein

Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators

Piezo-on-diamond resonators and resonator systems

Capacitive microaccelerometers and fabrication methods

Capacitive vertical silicon bulk acoustic resonator

Electrically-coupled micro-electro-mechanical filter systems and methods

Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports

Methods of forming oxide masks with submicron openings and microstructures formed thereby

Monolithic thin-film piezoelectric filters

Acoustically-engineered multi-port piezoelectric-on-semiconductor resonators for accurate temperature sensing and reference signal generation

Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same

Micro-electromechanical voltage tunable capacitor and and filter devices

Low frequency process-variation-insensitive temperature-stable micromechanical resonators

Micro-electromechanical switched tunable inductor

Integrated circuit oscillators having microelectromechanical resonators therein with parasitic impedance cancellation

Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto

Micro-hemispherical resonators and methods of making the same

Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted quadrature tuning electrode

MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning

Method and system of dual-mode actuation and sensing for real-time calibration of axisymmetric resonant gyroscopes

Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods

Resonant gyroscopes and methods of making and using the same

Integrated atomic beam collimator and methods thereof

Methods of forming micro-electromichanical resonators having boron-doped resonator bodies containing eutectic alloys

Process compensated micromechanical resonators

Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope

AYAZI FARROKH

Bulk acoustic wave gyroscope

Bulk acoustic wave accelerometers

Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope

Vibratory tuning fork based six-degrees of freedom inertial measurement MEMS device

Tunable Piezoelectric MEMS Resonators suitable for real-time clock applications

Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope

Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating

Piezoelectric micromechanical energy harvesters

Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethers

Bulk acoustic wave gyroscope with spoked structure

Mode-matched single proof-mass dual-axis gyroscope and method of fabrication

MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency

INTEGRATED DEVICE TECH

Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof

KOHL PAUL A

Packaging for micro electro-mechanical systems and methods of fabricating thereof

CASINOVI GIORGIO

Method and apparatus for self-calibration of gyroscopes

PANASONIC CORP

Apparatus and method for calibration of capacitance mismatch and temperature variations in a MEMS device