Inventor
HUGHES TIMOTHY M
US3 patents
Patents
3 patentsUS6210856B1Apr 3, 2001
Resist composition and process of forming a patterned resist layer on a substrate
IBM123 citations96
US6818381B2Nov 16, 2004
Underlayer compositions for multilayer lithographic processes
IBM21 citations92
US6927015B2Aug 9, 2005
Underlayer compositions for multilayer lithographic processes
IBM10 citations73