Inventor

SLOTBOOM DAAN MAURTIS

NL2 patents

⚠️ This page may combine multiple inventors who share the name “SLOTBOOM DAAN MAURTIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOFMANS GERARDUS CAROLUS JOHANNUS

1 patent

US8446564B2May 21, 2013

Lithographic apparatus and device manufacturing method

HOFMANS GERARDUS CAROLUS JOHANNUS2 citations56

SLOTBOOM DAAN MAURTIS

1 patent

US8477289B2Jul 2, 2013

Position measurement using natural frequency vibration of a pattern

SLOTBOOM DAAN MAURTIS2 citations52