Inventor
MOHARA YUKIHISA
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MOHARA YUKIHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
7 patentsUS7369223B2May 6, 2008
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP25 citations92
US7817261B2Oct 19, 2010
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP4 citations73
US7733473B2Jun 8, 2010
Inspection apparatus and inspection method
HITACHI HIGH TECH CORP6 citations73
US10458924B2Oct 29, 2019
Inspection apparatus and inspection method
HITACHI HIGH TECH CORP3 citations72
US7952700B2May 31, 2011
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP2 citations62
US12276618B2Apr 15, 2025
Defect inspection device
HITACHI HIGH TECH CORP0 citations51
US7999932B2Aug 16, 2011
Inspection apparatus and inspection method
HITACHI HIGH TECH CORP0 citations51