Inventor

FAN SU C

US2 patents

⚠️ This page may combine multiple inventors who share the name “FAN SU C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US8796783B2Aug 5, 2014

Borderless contact structure employing dual etch stop layers

IBM5 citations71

FAN SU C

1 patent

US8765585B2Jul 1, 2014

Method of forming a borderless contact structure employing dual etch stop layers

FAN SU C4 citations66