Inventor
SAKAUE HIROMITSU
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SAKAUE HIROMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS10115611B2Oct 30, 2018
Substrate cooling method, substrate transfer method, and load-lock mechanism
TOKYO ELECTRON LTD2 citations71
US11776828B2Oct 3, 2023
Vacuum processing device
TOKYO ELECTRON LTD1 citations59
US10340175B2Jul 2, 2019
Substrate transfer teaching method and substrate processing system
TOKYO ELECTRON LTD1 citations59
US12142506B2Nov 12, 2024
Substrate transfer apparatus, substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12512354B2Dec 30, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations48
US10872797B2Dec 22, 2020
Substrate processing apparatus and method of operating substrate processing apparatus
TOKYO ELECTRON LTD0 citations33
US10607878B2Mar 31, 2020
Transfer device and correction method
TOKYO ELECTRON LTD0 citations31