Inventor
KANETAKA HIDEMI
JP3 patents
Patents
3 patentsUS5554413ASep 10, 1996
Method of manufacturing electronic device and apparatus for manufacturing the same
TOSHIBA KK13 citations71
US8021565B2Sep 20, 2011
Surface treatment method, etching method, and method for manufacturing electronic device
TOSHIBA KK2 citations57
US7368342B2May 6, 2008
Semiconductor device and method of manufacturing the same
TOSHIBA KK0 citations50