Inventor
YONENAGA TOMIHIRO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “YONENAGA TOMIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS6436193B1Aug 20, 2002
Gas processing apparatus baffle member, and gas processing method
TOKYO ELECTRON LTD262 citations97
US5332442AJul 26, 1994
Surface processing apparatus
TOKYO ELECTRON LTD139 citations97
US5525160AJun 11, 1996
Film deposition processing device having transparent support and transfer pins
TOKYO ELECTRON LTD78 citations95
US5972114AOct 26, 1999
Film deposition apparatus with anti-adhesion film and chamber cooling means
TOKYO ELECTRON LTD32 citations92
US5711815AJan 27, 1998
Film forming apparatus and film forming method
TOKYO ELECTRON LTD28 citations92
US7648610B2Jan 19, 2010
Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate
TOKYO ELECTRON LTD42 citations91
US9750087B2Aug 29, 2017
Heat treatment apparatus
TOKYO ELECTRON LTD0 citations41