P

Inventor

MIHARA NAOKI

JP11 patents
⚠️ This page may combine multiple inventors who share the name “MIHARA NAOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents
US9048070B2Jun 2, 2015

Dielectric window for plasma treatment device, and plasma treatment device

TOKYO ELECTRON LTD3 citations61
US10312057B2Jun 4, 2019

Plasma processing apparatus

TOKYO ELECTRON LTD1 citations59
US10319568B2Jun 11, 2019

Plasma processing apparatus for performing plasma process for target object

TOKYO ELECTRON LTD1 citations55
US10062547B2Aug 28, 2018

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations51
US11543807B2Jan 3, 2023

Mounting state informing apparatus and mounting state informing method

TOKYO ELECTRON LTD0 citations40
US9324542B2Apr 26, 2016

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations37

MIHARA NAOKI

2 patents
US8920596B2Dec 30, 2014

Plasma processing apparatus

MIHARA NAOKI0 citations46
US8663424B2Mar 4, 2014

Plasma processing apparatus and gas supply member support device

MIHARA NAOKI0 citations33

EBARA CORP

1 patent
US7374646B2May 20, 2008

Electrolytic processing apparatus and substrate processing method

EBARA CORP2 citations61

MOYAMA KAZUKI

1 patent
US9111726B2Aug 18, 2015

Plasma processing apparatus

MOYAMA KAZUKI2 citations59

NOZAWA TOSHIHISA

1 patent
US9277637B2Mar 1, 2016

Apparatus for plasma treatment and method for plasma treatment

NOZAWA TOSHIHISA0 citations40