Inventor

SUDOU KENJI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SUDOU KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US10896842B2Jan 19, 2021

Manufacturing method of sample table

TOKYO ELECTRON LTD2 citations70

US9324542B2Apr 26, 2016

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations37

MIHARA NAOKI

1 patent

US8663424B2Mar 4, 2014

Plasma processing apparatus and gas supply member support device

MIHARA NAOKI0 citations33