Inventor
OMATA TAKATSUGU
JP27 patents
⚠️ This page may combine multiple inventors who share the name “OMATA TAKATSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
14 patentsUS10103277B2Oct 16, 2018
Method for manufacturing oxide semiconductor film
SEMICONDUCTOR ENERGY LAB27 citations98
US9711655B2Jul 18, 2017
Oxide semiconductor film and semiconductor device
SEMICONDUCTOR ENERGY LAB41 citations98
US9331208B2May 3, 2016
Oxide semiconductor film and semiconductor device
SEMICONDUCTOR ENERGY LAB59 citations98
US8994021B2Mar 31, 2015
Oxide semiconductor film and semiconductor device
SEMICONDUCTOR ENERGY LAB57 citations98
US8680522B2Mar 25, 2014
Oxide semiconductor film and semiconductor device
SEMICONDUCTOR ENERGY LAB62 citations98
US10916663B2Feb 9, 2021
Oxide semiconductor film and semiconductor device
SEMICONDUCTOR ENERGY LAB12 citations94
US9490351B2Nov 8, 2016
Semiconductor device and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB11 citations84
US9054205B2Jun 9, 2015
Semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB5 citations84
US7772523B2Aug 10, 2010
Laser irradiation apparatus and laser irradiation method
SEMICONDUCTOR ENERGY LAB19 citations84
US8349714B2Jan 8, 2013
Method of crystallizing semiconductor film and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB3 citations63
US7960261B2Jun 14, 2011
Method for manufacturing crystalline semiconductor film and method for manufacturing thin film transistor
SEMICONDUCTOR ENERGY LAB2 citations63
US7393764B2Jul 1, 2008
Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations63
US7947570B2May 24, 2011
Manufacturing method and manufacturing apparatus of semiconductor substrate
SEMICONDUCTOR ENERGY LAB1 citations52
US7664365B2Feb 16, 2010
Beam homogenizer, and laser irradiation method, laser irradiation apparatus, and laser annealing method of non-single crystalline semiconductor film using the same
SEMICONDUCTOR ENERGY LAB0 citations52
TANAKA KOICHIRO
5 patentsUS8338278B2Dec 25, 2012
Method of manufacturing semiconductor device with crystallized semiconductor film
TANAKA KOICHIRO6 citations73
US8188402B2May 29, 2012
Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device
TANAKA KOICHIRO2 citations63
US8456083B2Jun 4, 2013
Lighting device
TANAKA KOICHIRO0 citations52
US8232723B2Jul 31, 2012
Lighting device
TANAKA KOICHIRO0 citations52
US8138058B2Mar 20, 2012
Substrate with marker, manufacturing method thereof, laser irradiation apparatus, laser irradiation method, light exposure apparatus, and manufacturing method of semiconductor device
TANAKA KOICHIRO1 citations52