Inventor
WEI JOSEPH
US3 patents
Patents
3 patentsUS12531208B2Jan 20, 2026
Low temperature plasma enhanced chemical vapor deposition process including preheated showerhead
LAM RES CORP0 citations38
US9902415B2Feb 27, 2018
Universal service cart for semiconductor system maintenance
LAM RES CORP0 citations33
US10418269B2Sep 17, 2019
Storing and organizing minimum contact area features and wafer transfer pins during system maintenance
LAM RES CORP0 citations30